What is PEGASUS?
Pegasus is a powerful simulation software application for engineers and researchers who use vacuum and atmospheric technology, such as equipment makers, material suppliers, device makers and academia.
With over 13 years of development, Pegasus offers a mature, advanced application for users wishing to simulate numerous processes used in the research and development of products in the semiconductor, electronic, materials, automotive, aerospace, and solar industries. A wide range of thin film processes are supported, including dry etching, sputtering and CVD.
PEGASUS covers the range from a gas-phase simulation in a large equipment (meter size) to a feature profile simulation in a microscopic region. The software consists of several modules which have different functions. A realistic and effective simulation can be provided by using two or more modules together.
Rarefied Gas Equipment Simulation
- Rarefied gas dynamics or viscous flow in various vacuum equipments
- Carrier gas flow and film thickness distribution in vacuum evaporation
Plasma Equipment Simulation
- Behavior of feed gas, charged particles, excited and radical neutrals in PECVD/etching reactors
- Behavior of plasma and sputtered particles in magnetron sputtering equipment
- Magnetron/Hollow Cathode/Surface Discharge
- Behavior of electron/ion beam
- Plasma based ion implantation
- Plasma based surface modification
Feature Profile Simulation
- Feature profile evolution in PVD/CVD/dry etching processes
Rarefied Gas Dynamics Simulation
- Behavior of nano-particles in rarefied gas
- Behavior of atoms/molecules in a microscopic region
- Vacuum evacuation
Composition of products
PEGASUS is classified into three major module groups:
- Two- or three-dimensional gas-phase simulator
- Surface science simulator and two- or three-dimensional feature profile simulator. Surface science simulator computes a state of surface of a target. Feature profile simulator computes feature profile of surface of a substrate.
- Gas-phase simulator computes the spatial profile such as density, temperature and flow velocity of neutral gas and/or ionized gas in a chamber or a reactor.
Each module is able to run not only by itself but also by combining with the other module. In other words, these modules in PEGASUS have been designed to be able to give the maximum effect for minimum investment by combining with other modules corresponding to the users' needs.
Two-dimensional gas-phase simulators
The modules in the simulator compute the spatial profile of plasma, electron and ions, and/or neutral particles, feed gas and/or radicals generated by neutral-plasma reactions, in a reactor or a chamber.
- PHM ( Plasma Hybrid Module )
This module computes spatial distributions of densitiy of charged particles and electric field etc., in a reactor with using a hybrid simulation model.
- PIC-MCCM ( Particle In Cell with Monte Carlo Collision Module )
This module computes spatial distributions of density of charged particles and electric field etc., in a reactor using a particle-in-cell model and a Monte Carlo collision model.
- NMEM ( Neutral Momentum Equation Module )
This module computes spatial distribution of density and pressure of each neutral species by using a continuum fluid model.
- DSMCM ( Direct Simulation Monte Carlo Module )
DSMCM is a two-dimensional DSMC software.
- MSSM ( Magneto Static Simulation Module )
MSSM computes spatial distribution of magnetic flux density by permanent magnet or magnetic coils .
3D gas-phase simulators
- RGS3D ( 3D Rarefied Gas dynamics Simulation software )
RGS3D computes the spatial distribution of density, temperature and pressure of neutral particles in arbitrary three dimensional shape.
- PIC-MCCM 3D
3D version of PIC-MCCM.
- MSSM 3D
3D version of MSSM.
Surface science simulators
The modules in the simulator compute a state of surface of a target or a substrate.
- SMCSM ( Sheath Monte Carlo Simulation Module )
This module computes incident energy distribution and angular distribution onto a target or a substrate by tracing the motion of electrons and ions in a sheath depend on time.
- SASAMAL ( Simulation of Atomic Scattering in Amorphous MAterial based on Liquid model )
SASAMAL is a simulation software for high dose ion implantation and sputtering based on a binary collision approximation.
- SPUTSM ( SPUTtering Simulation Module )
SPUTSM is a module to compute sputtered particle flux, angular distribution and energy distribution of sputtered particles by using SASAMAL and the result such as incident ion flux, ion energy and incident angle of ions from PIC-MCCM.
Feature profile simulators
The following modules compute feature profiles of surface of a substrate or a deposited thin film in PVD, plasma CVD or dry etching processes.
- FPSM2D ( Feature Profile Simulation Module-2D )
FPSM2D is a module to compute time-dependent feature profiles of substrate or deposited film using various physical/chemical reactions on surface by particle Monte Carlo method.
- FPSM3D ( Feature Profile Simulation Module-3D )
This is 3D version of FPSM2D.
Graphical User Interface module
- GUIM ( Graphical User Interface Module )
GUIM is a graphical user interface for control of execution of all of modules, for definition of region, mesh generation and definition of boundary conditions, for graphical output of various quantities. All of modules in PEGASUS are able to execute via GUIM.