Pegasus Simulation Tools

Making Plasma Enhanced materials processing and Surface Simulation accessible!



PEGASUS is software to simulate plasma behavior, and to simulate rarefied gas dynamics. The following simulation can be performed by combining and using each module of PEGASUS:

  • Plasma and sputtering particles in magnetron sputtering equipments.
  • Plasma and Fed gas, radicals, other dissociative neutrals in CCP/ICP reactors.
  • Micro plasma
  • Evaporating particles in vacuum evaporation equipments.
  • Rarefied gas dynamics in various vacuum chambers and vacuum pumps.
  • Ion implantation
  • Feature profile in micro fabrications.

Pegasus has been developed as a practical simulation software application to support R&D and manufacturing engineers where plasma processing and vacuum technology is applied. This includes semiconductor, flat panel display optics, electronics and other sectors.


What is Pegasus?

Hardware to Model conversion

Simulation Output




Download the Pegasus Overview

To determine if Pegasus is suitable for your research or application, download the overview to view more information on the simulation software, available simulation models. sample applications and other useful information. 

Download more information   Pegasus Overview