Ministar Platform Single Chamber Standard System Features
|Ministar - RIE||TMP, Chiller, 4 gas channels, 300W RF|
|Ministar - PECVD||Heater (Chuck Heating), 4 gas channels, 300W RF|
|Ministar - ICP||TMP, Chiller, 4 gas channels, 300W Bias, 600W ICP|
|Ministar - Sputter||4 inch target, TMP, Chuck Heater, Chiller, 2 gas channels, 300W RF or 1kW DC selection|
Alternative configurations and options available.
Ministar 3C Platform Multi-Chamber Systems
|Ministar - RIE + PECVD||8 gas channels|
|Ministar - RIE + ICP||6 gas channels|
|Ministar - ICP + PECVD||8 gas channels|
|Ministar - Sputter + Sputter||2 gas channels|
|Ministar - RIE + PECVD + ICP||10 gas channels|
|Ministar - Sputter & Sputter & Sputter||2 gas channels|
Note: Specifications are subject to change. The above specifications relate to entry-level systems. Higher specification systems with increased number of gas lines, higher power delivery and other variants are available.